Recent progress of hard X-ray imaging microscopy and microtomography at BL37XU of SPring-8

Abstract

A hard X-ray imaging microscopy and microtomography system is now being developed at the beamline 37XU of SPring-8. In the latest improvement, a spatial resolution of about 50nm is achieved in two-dimensional imaging at 6 keV X-ray energy using a Fresnel zone plate objective with an outermost zone width of 35nm. In the tomographic measurement, a spatial resolution of about 100nm is achieved at 8 keV using an X-ray guide tube condenser optic and a Fresnel zone plate objective with an outermost zone width of 50nm.