High-performance, low-noise digital controller for inchworm piezoelectric translators

Abstract

We have designed and constructed a high-performance, low-noise digital controller for "inchworm" piezoelectric translators. The controller features a maximum output voltage of 700 V, an rms noise level of less than 2 mV, and is capable of driving inchworms at speeds of up to 0.23 mm/s. The controller offers substantially better performance in terms of resolution, noise, speed, and cost than commercial controllers, and is suitable for atomic resolution scanning tunneling microscopy and atomic force microscopy applications.