MEMS air-microfluidic lab-on-a-chip sensor for personal monitoring of airborne particulate matter

Abstract

We present the design, fabrication and experimental results for a novel air-microfluidic lab-on-a-chip sensor, which measures the mass concentration of airborne particulate matter (PM), such as tobacco smoke or diesel exhaust. The sensor detects PM having aerodynamic diameter (AD) of less than 2.5μm, (PM2.5) directly by measuring the deposited PM on a mass-sensing resonator, at flowrates two orders of magnitude lower than the closest comparable devices. We report on an improved sensor design, new mask-less dispenser-printed SU-8-based bonding process, and recorded sensitivity of our newly-developed design.