Optimization of Nano Capacitive Pressure Sensor for Medical Applications

Abstract

Nano/NEMS sensors have emerged from MEMS technology. Nano sensors have got lot of applications in medical and health care applications. Nano sensors have lot of attributes which make them very unique and special, such as: small size, low mass, high sensitivity and low cost of production. In this paper we present optimization of nano capacitive pressure sensor dimensions for medical applications. Capacitive pressure sensors are well suited for low pressure sensing applications. Typically, in medical field involve low pressure levels ranging from few Pascals to kilo Pascals. DoE is used for the optimization of sensor dimensions. The sensor is optimized to operate over the pressure range up to 100 kPa. Over this pressure range the sensor dimensions are optimized to get better response in terms of capacitance. The proposed optimization illustrates the dimensions best suited for the design of nano capacitive pressure sensor for operational range up to 100 kPa.