MEMS Fabry-Perot sensor for accurate high pressure measurement up to 10 MPa

Abstract

Microelectromechanical system (MEMS) Fabry-Perot fiber-integrated pressure sensor exhibits a compact size, intrinsic safety, and high precision measurement. Here, a MEMS Fabry-Perot interferometer sensor is presented. The sensor is fabricated using a standard microfabrication process with a uniformity of 80%. The sensor enables a pressure measurement range of 0–10 MPa with a full-scale nonlinearity error of 1.44% and a repeatability error of 2.14%. A limit of detection of 1.74 kPa and a pressure resolution of 0.017% are achieved. The comparative experiment is conducted to verify the wavelength tracking method is more robust than cavity length demodulation method in this configuration. Moreover, the temperature drift is alleviated by combining a fiber Bragg grating sensor for compensation in a range of -35–88 °C, which is reduced by 15 times to 2.88 ppm/°C. The proposed sensor has wide potential applications, such as downhole environments and petroleum pipeline pressure monitoring.