Bistable arch-like beams with modulated profile as perspective supporting structures of a microelectromenchanical actuator

Abstract

The static mechanical properties of a bistable electromechanical drive with arcuate suspension is investigated. The behaviour of an arcuate suspension and the influence of the beam thickness modulation on the stability of both stationary states is studied experimentally and theoretically. The influence of the beam shape modulation on its potential energy was determined with finite element analysis. The simulation results were verified experimentally. In the study, the optimal modulation configuration is determined. With help of this modification the sustainability of both mechanically stable states is significantly improved.