Reliability Study of MEMS Resonator: A Review

Abstract

Reliability study is required for all the industrial applications to understand the behavior and functionality of device with respect to technological, environmental and operational issues. This paper aim to study and analyzed the exiting contribution related to MEMS resonator in order to explore the reliability issues. It also explored the reliability related to packaging, designing and functioning of MEMS resonator. It summarized the analysis of Environmental effect, design parameters, intermolecular forces, varying electrical load and vibrations etc. An approach and methodology for testing and simulation of MEMS resonator in view of reliability analysis is presented.