Comparison of camera calibration and measurement accuracy techniques for phase measuring deflectometry

Abstract

Phase measuring deflectometry (PMD) is a competitive method for specular surface measurement that offers the advantages of a high dynamic range, non-contact process, and full field measurement; furthermore, it can also achieve high accuracy. Camera calibration is a crucial step for PMD. As a result, a method based on the calibration of the entrance pupil center is introduced in this paper. Then, our proposed approach is compared with the most popular photogrammetric method based on Zhang’s technique (PM) and Huang’s modal phase measuring deflectometry (MPMD). The calibration procedures of these three methods are described, and the measurement errors introduced by the perturbations of degrees of freedom in the PMD system are analyzed using a ray tracing technique. In the experiment, a planar window glass and an optical planar element are separately measured, and the measurement results of the use of the three methods are compared. The experimental results for the optical planar element (removing the first 6 terms of the Zernike polynomial) show that our method’s measurement accuracy reached 13.71 nm RMS and 80.50 nm PV, which is comparable to accuracy values for the interferometer.