Measurement of the nonlinear elasticity of doped bulk-mode mems resonators

Abstract

In this paper, we present measurements of the nonlinear amplitude-frequency (A-f) coefficients for three types of bulk-mode silicon MEMS resonators with different doping type and concentration. Our experimental results clearly show a strong dependence of the nonlinearity character on the orientation, doping level, and vibrational mode shape. These results indicate that the doping can have a significant impact on the character and strength of the elastic nonlinearities in MEMS devices.