Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma -A Brief Introduction

Abstract

Optical emission spectroscopy has been employed as non-invasive plasma diagnostics method and it is to detect the light emission during titanium nitride deposition using magnetron sputtering plasma discharge. The optical emission from argon and titanium were used to observe the ionization ratio of each element during the discharge. Then, the optical emission of nitrogen spectrum was used for the calculation of gas rotational temperature by using a simple formula and it was evaluated at various discharge conditions. A comparative of two different spectrometers resolution have been used for the determination of gas temperature. The results showed that the evaluated temperatures were almost the same as expected in high-pressure magnetron sputtering plasmas even when using low-resolution of spectrometer.