Grating Projection System for Profiling with the Aid of Fringe Scanning Method

Abstract

Fringe scanning is introduced to the grating projection system for profiling which has been developed to capture three-dimensional shape of the objective. This revised system can give more dense measuring points and elliminate the influence of the surfacial pattern of the specimen. The final measurement is realized with the error ratio of 0.005 to the covering range. Some discussions are also made on the conventional fringe scanning method using a sinusoidal grating, and a trial with a liquid crystal grating, instead of interference fringes, has proved to be applicable to the fringe scanning method. © 1989, The Japan Society for Precision Engineering. All rights reserved.