Small directional microelectromechanical systems (MEMS) microphone arrays

Abstract

Directional microphone arrays that are physically small compared to the acoustic wavelength are of great interest for hand-held communication devices. Spatially directive microphones can reduce the impact of background acoustic noise without adding distortion to the signal. This talk will present some design topologies and requirements as well as a new physical design for a MEMS velocity sensing microphone that could enable directional microphone responses while being small in size. © 2013 Acoustical Society of America.