Low-Cost, Compact Quadrupole Mass Filters with Unity Mass Resolution via Ceramic Resin Vat Photopolymerization

Abstract

This study reports novel, compact, and additively manufactured quadrupole mass filters (QMFs) with adequate filtering performance for practical mass spectrometry applications. The QMFs are monolithically fabricated via vat photopolymerization of glass-ceramic resin using 57 µm × 57 µm × 100 µm voxels, and selective electroless plating of nickel-boron. Experimental characterization of QMF prototypes at 1.74 MHz using FC-43 yields 131 Da peaks with 0.50 Da full width at half maximum (260 resolution), surpassing the resolution of reported miniaturized counterparts under similar conditions, and being on par with commercial, non-miniaturized, heavier devices. The sensitivity of the 3D-printed devices is estimated at 0.13 mA Torr−1 (comparable to that of optimized, commercial counterparts), while the devices attained up to 250 Da of mass range (limited by the driving electronics). The work is of interest to low-cost, capable mass spectrometry, 3D-printed instruments, and in-space manufacturing of complex instrumentation.