Epitaxial Growth of CaMnO3–y Films on LaAlO3 (112¯0) by Pulsed Direct Current Reactive Magnetron Sputtering

Abstract

CaMnO3 is a perovskite with attractive magnetic and thermoelectric properties. CaMnO3 films are usually grown by pulsed laser deposition or radio frequency magnetron sputtering from ceramic targets. Herein, epitaxial growth of CaMnO3–y (002) films on a (Formula presented.) -oriented LaAlO3 substrate using pulsed direct current reactive magnetron sputtering is demonstrated, which is more suitable for industrial scale depositions. The CaMnO3–y shows growth with a small in-plane tilt of <101> and <002>, forming stacking faults.