A high-brightness large-diameter graphene coated point cathode field emission electron source

Abstract

There have been several long-standing problems of cold field emission sources for electron microscopy and lithography that have prevented their widespread use, such as their inherent ultrahigh vacuum condition requirement (<10-9 torr), relatively poor current stability and rapid emission decay. This paper presents a cold field emission electron source which overcomes these problems based upon using a graphene-coated nickel point cathode. Preliminary experiments demonstrate that it provides stable emission for relatively large tip diameters (micron sizes), can operate in high vacuum conditions (>10-8 torr) and has an ultralow work function value of 1.10 ± 0.07 eV. It has an estimated reduced brightness value of 1.46 × 109 A m-2 sr-1 V-1 for cathode tip-radius of 170 nm and the measured energy spread ranges from 0.246 eV to 0.420 eV for a tip radii range of 260 nm to 500 nm, which is comparable to state-of-the-art conventional cold field emission sources.