Electrochemical hydrogen peroxide sensor based on macroporous silicon

Abstract

Macroporous silicon was prepared through an anodization process; the prepared samples showed an average pore size ranging from 4 to 6 microns, and the depth of the pores in the silicon wafer was approximately 80 microns. The prepared samples were tested for hydrogen peroxide (H2 O2) concentrations, which can be used for industrial and environmental sensing applications. The selected H2 O2 concentration covered a wide range from 10 to 5000 µM. The tested samples showed a linear response through the tested H2 O2 concentrations with a sensitivity of 0.55 µA µM–1·cm–2 and lower detection limits of 4.35 µM at an operating voltage of 5 V. Furthermore, the electrode exhibited a rapid response with a response time of ca. two seconds. Furthermore, the prepared sensor showed a reasonable stability over a one-month time period.