A novel, high-resolution resonant thermometer used for temperature compensation of a cofabricated pressure sensor

Abstract

Temperature compensation of a capacitive pressure sensor with a cofabricated, high-resolution, resonant thermometer is presented in this paper. The epi-seal encapsulated resonant thermometer yields a resolution of 10 mK due to the ultra-clean operating environment. By co-locating such a temperature sensor with a pressure sensor and fabricating them in a shared substrate, temperature measurement accuracy can be greatly improved. With this arrangement for temperature compensation, the pressure sensor shows a 100x reduction in the temperature dependence and realizes sensing accuracy within ±0.1% FSO for the tested temperature range between 15 to 65 °C.