Plasma-bonding of poly(dimethylsiloxane) to glass

Abstract

For the purpose of bonding poly(dimethylsiloxane) (PDMS) to glass, both components’ surfaces were treated with low-pressure oxygen plasma, indirect corona or simply with an oxygen-rich butane gas flame. In the case of low-pressure oxygen plasma treatment, the process parameters were varied and optimized with the consequence that the achieved adhesion between PDMS and the glass substrate was so strong that the PDMS could not be peeled off the glass slide without damaging the elastomer.