Micro-Raman spectroscopy of the solid state: Applications to semiconductors and thin films

Abstract

The potential of Raman microspectroscopy as a powerful tool in characterizing solids will be demonstrated here with several applications on semiconductors and thin films. The method not only permits the identification of different localized microscopic regions, with a high spatial resolution and with no sample preparation, but also provides several basic information on the microstructure of solids.