Book Chapter

Shack-Hartmann Sensors for Industrial Quality Assurance

  • Pfund J
  • Beyerlein M
  • Dorn R
Springer-Verlag, (2006), 141-150
DOI: 10.1007/3-540-28867-8_16
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Abstract

The measurement of the deviations of a test sample from its ideal shape is the key to quality assurance in fabrication processes of the optical industry. Here, interferometers are often used as standard tools. However, in recent years Shack-Hartmann sensors have been...

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Pfund, J., Beyerlein, M., & Dorn, R. (2006). Shack-Hartmann Sensors for Industrial Quality Assurance. In Adaptive Optics for Industry and Medicine (pp. 141–150). Springer-Verlag. https://doi.org/10.1007/3-540-28867-8_16

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