Design and fabrication of a flow delivery microdevice with asymmetric microelectrodes pairs

Abstract

A microdevice using AC electrokinetic flow and negative dielectrophoresis for cell delivery is proposed, designed and fabricated. The device is made from an unequal width interdigitated microelectrode located at the bottom of microchannels, with AC voltage applied to the small and large electrode. Negative dielectrophoresis is used to prevent the cells from sinking down to the bottom of delivery channel. The flow rate is affected by the electrode pair dimensions, applied frequency and voltage and are analysed. The device electrode width is from 4νm to 20νm and it is microfabricated on glass wafer using gold thin film. 3 microchannels connected to 2 reservoirs are covered by the electrode pair for the delivery channel. SU-8 micromold is used for the channels' PDMS fabrication. © 2006 IOP Publishing Ltd.