Abstract
We are going to present in this paper an interesting idea to fabricate 3D high aspect ratio micro structures. Pillars with different heights can be generated with one step UV lithography. Various 3D micro structures have been successfully fabricated. We will introduce the idea of this approach, fabrication details, and plenty of successful experimental results in this paper. A Taiwan 3D terrain map will be selected to demonstrate the ability of the proposed method. © 2007 IEEE.
Cite
CITATION STYLE
Yang, W., Wang, T., Huang, H., & Fu, C. (2007). 3D high aspect ratio micro structures fabricated by one step UV lithography. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 571–574). https://doi.org/10.1109/NEMS.2007.352083
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