One-step transfer printing of patterned nanogap electrodes

  • Saller K
  • Riedl H
  • Lugli P
  • et al.
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Abstract

Direct printing of nanogap-separated metallic contact pairs is described that enables novel nanoelectronic device architectures. Nanotransfer printing (nTP) stamps are grown by molecular beam epitaxy involving layered III-V semiconductors that are selectively etched. Finished stamps comprise both the nanoscale surface trench that becomes the nanogap on printing and a microscale, predetermined geometry that affords the simultaneous integration of contact pads for external electrical testing. This nTP technique is well suited for top-contacting sensitive thin films for electrical characterization; a typical electrode configuration is illustrated by transfer-printed 13 nm thin metal films that are separated by an electrically insulating gap of ca. 30 nm.

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Saller, K. B., Riedl, H., Lugli, P., Koblmüller, G., & Tornow, M. (2019). One-step transfer printing of patterned nanogap electrodes. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 37(4). https://doi.org/10.1116/1.5100560

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