Colour micrographs for backscattered electron signals in the SEM

Abstract

The backscattered electron (BSE) signals detected by a pair of detectors in the SEM can be used for producing colour micrographs. The image corresponding to any of these signals, or to a mixture of these signals, is assigned one primary colour and two or more of these images are superimposed onto the same colour frame. In addition, the mixing of signals from the gaseous detector device together with their use for colour imaging is also examined. Copyright © 1986 Foundation for Advances in Medicine and Science, Inc.