Differential Hall effect profiling of ultrashallow junctions in Sb implanted silicon

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Alzanki, T., Gwilliam, R., Emerson, N., & Sealy, B. J. (2004). Differential Hall effect profiling of ultrashallow junctions in Sb implanted silicon. Applied Physics Letters, 85(11), 1979–1980. https://doi.org/10.1063/1.1792378

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