Abstract
This paper presents the packaging, fabrication, and calibration of a piezoresistive skin-friction sensor for the direct measurement of wall shear stress. The floating-element structure integrates laterally-implanted piezoresistors into the tether sidewalls to form a fully active Wheatstone bridge for electromechanical transduction. Experimental characterization at a bias voltage of 1.5 V indicates a sensitivity of 4.24 µV / Pa, a noise floor of 11.4 mPa / √Hz at 1 kHz, a linear response up to the maximum testing range of 2 Pa, and a flat dynamic response up to the testing limit of 6.7 kHz.
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CITATION STYLE
Li, Y., Chandrasekharan, V., Bertolucci, B., Nishida, T., Cattafesta, L., Arnold, D. P., & Sheplak, M. (2008). A laterally-implanted piezoresistive skin-friction sensor. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 304–307). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2008.79
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