High-speed silicon-based microring modulators and electro-optical switches integrated with grating couplers

Abstract

We demonstrate high-speed silicon-based microring modulators and electro-optical switches which are integrated with grating couplers. Wafer-level measurements are set up for the devices characterizations without wafer cleaving and facet polishing. 10 Gbit/s NRZ modulation is realized under pre-emphasis driving signals. Switch on/off time of 300/380ps are demonstrated in the asymmetrical 1x2 microring switch with an add-drop crosstalk of -23dB.