An analytical and experimental study of ultrasonic linear motors

Abstract

Ultrasonic linear motors (ULMs) are widely used in many industrial applications and a full characterization of their behaviour is often needed. This paper presents a detailed analytical-experimental study of ULMs. First, the general structure and operation principle of ULMs are introduced. The actuator mechanics is then described using a simple piezoelectric model. Since, in practice, ULMs are most often used as actuators for positioning mechanisms, the proposed model includes electromechanical relations which offer designers a broad range of possibilities for precise positioning and reliable model-based control. Finally, ULMs are experimentally investigated to determine the conditions that allow an optimal performance.