A simple model to describe the rule of glancing angle deposition

Abstract

A model was built to study the rule of glancing angle deposition. This model, which is called hemisphere model, is convenient to describe how the experimental conditions influence morphology of the nanostructures prepared by GLAD. Influence of experiment conditions such as incidence angle, incidence rate, substrate temperature, and substrate rotation rate are theoretical analyzed by the hemisphere model, and validated respectively by amount of experiments. As an application of the model, metals of different melting points were deposited into coherent multi-section nanorods by adjusting substrate temperature. ©2011 The Japan Institute of Metals.