Structural and Morphological Properties of TiO2 Nanotubes Fabricated via Electro-anodization Process

Abstract

Electro-anodization of thin Ti film deposited on glass substrate by RF sputtering technique was employed to fabricate TiO2 Nanotubes (TNTs) annealed from 350°C to 650°C. The morphological analysis were done using Scanning Electron Microscopy (SEM), which showed the change in the surface morphology with increase in annealing temperature. The structural analysis was performed using X-ray Diffraction (XRD) and Raman spectroscopy. XRD revealed the presence of anatase phase TiO2 with most intense anatase peak found at 550°C, at 2θ of 28, 9° (101). Raman revealed the presence of only anatase phase of TiO2, and showed well-improved crystallinity of the TNTs upon increasing in annealing temperature.