Review Article: Catalysts design and synthesis via selective atomic layer deposition

  • Cao K
  • Cai J
  • Liu X
  • et al.
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Abstract

Tailoring catalysts with atomic level control over active sites and composite structures is of great importance for advanced catalysis. This review focuses on the recent development of area selective atomic layer deposition (ALD) methods in composite catalysts design and synthesis. By adjusting and optimizing the area selective ALD processes, several catalytic structures are developed, including core shell structures, discontinuous overcoating structures, and embedded structures. The detailed synthesis strategies for these designed structures are reviewed, where the related selective approaches are highlighted and analyzed. In addition, the catalytic performance of such structures, including activity, selectivity, and stability, is discussed. Finally, a summary and outlook of area selective ALD for catalysts synthesis and applications is given.

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Cao, K., Cai, J., Liu, X., & Chen, R. (2018). Review Article: Catalysts design and synthesis via selective atomic layer deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 36(1). https://doi.org/10.1116/1.5000587

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