Design, Electrostatic and Eigen Frequency Analysis of Fixed– Fixed Beam MEMS Resonator

Abstract

The objective of this paper is to design of fixed–fixed MEMS Resonator. The beam of resonator is\rmade up of poly-silicon. This paper also presents the electrostatic and Eigen frequency analysis of MEMS\rresonator. The resonator used in oscillator which can be fabricated on chip. It can also be used as Switch. The\rsize of crystal oscillator is in order of centimeter but the size of MEMS Resonator is in order of microns, so by\rreplace a crystal oscillator by MEMS Resonator, we can reduce the size of the system. The dc voltage is given to\rthe beam of resonator for electrostatic analysis & Eigen frequency analysis in different modes.\r\r