Elastic characterization of Au thin films utilizing laser induced acoustic Rayleigh waves

Abstract

Wide frequency-band Rayleigh waves (∼100 MHz) were utilized to characterize the elastic constants of thin Au/Cr films deposited on glass substrates. The Rayleigh waves were excited utilizing laser induced thermoelastic mechanism and detected using a knife-edge technique apparatus. The dispersion of the signals in glass substrates coated with Au/Cr was measured and fitted to theory using a non-linear regression algorithm. From the fitting, the Au films Young modulus and the film thickness were extracted. The results were analyzed with regards to AFM scans performed on the samples and independent thickness measurement done by a dektak3 profiler. Results show a good agreement between the two measurements.