A marked improvement in the reliability of the measurement of trace moisture in gases

Abstract

The reliability of the measurement of trace moisture in a gas was improved markedly owing to the establishment of a trace moisture standard at AIST. As a result, problems with conventional methods of measuring trace moisture in gases have been revealed. This article presents the scenario that we adopted to improve the reliability of the measurement of trace moisture, development of a national trace moisture standard, provision of metrological traceability to a national standard for industrial measurements, and problems of the commercially available trace moisture analyzers as revealed through comparisons with the national standard. This improvement makes it possible to properly evaluate the quality of high-purity gases used in industry.