Frictional behaviour of TiN coatings grown by atomic layer deposition

Abstract

The main idea of the presented work is the evaluation of frictional properties of the TiN coatings deposited by atomic layer deposition technology using atomic force microscopy approach. Ogletree method was employed in order to calibrate the lateral force and estimate the average friction coefficient of TiN coatings. Obtained titanium nitride coatings were also characterized in terms of morphology, surface topography and mechanical properties. The evaluation has been done with reference to the commercially available TiN produced by commonly known magnetron sputtering method.