The elastic properties and plastic behavior of two-dimensional polymer structures fabricated by laser interference lithography

Abstract

The elastic and plastic properties within a two-dimensional polymer (SU8) structure with sixfold symmetry fabricated via interference lithography are presented. There is a nonuniform spatial distribution in the elastic modulus, with a higher elastic modulus obtained for nodes (brightest regions in the laser interference pattern) and a lower elastic modulus for beams (darkest regions in the laser interference pattern) of the photopatterned films. We suggest that such a nonumformity and unusual plastic behavior are related to the variable material properties "imprinted" by the interference pattern. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA.