Abstract
Semiconductor manufacturing is a highly complex and asset intensive process. Solutions are needed to automate control of equipment and improve efficiency. We describe a symbiotic simulation control system which uses reactive what-if analysis to find a stable configuration of a wet bench tool set. This control system is based on a generic framework for symbiotic simulation. We show that symbiotic simulation can be used to make control decisions in near real-time. Furthermore, we show that our approach yields a notable performance improvement over common practise. © 2008 Springer-Verlag Berlin Heidelberg.
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CITATION STYLE
Aydt, H., Turner, S. J., Cai, W., Low, M. Y. H., Lendermann, P., & Gan, B. P. (2008). Symbiotic simulation control in semiconductor manufacturing. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 5103 LNCS, pp. 26–35). https://doi.org/10.1007/978-3-540-69389-5_5
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