Ultra-precision figuring using submerged jet polishing

Abstract

A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 λ to 0.024 λ (λ=632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces. ©2011 Chinese Optics Letters.