Field-dependent resonant behavior of thin nickel film-coated microcantilever

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Abstract

Herein we describe the vibration of a thin nickel film-coated microcantilever at resonance under an external magnetic field. The resonance frequency and the mechanical loss-experimentally observedwhile varying themagnetic field-closely follow the field-dependence of the magnetostriction coefficient, indicating the strong coupling between the mechanical motion and the magnetostriction through the surface stress. Comparing to the surface stress model based on uniformly distributed axial load, the magnetostriction coefficient of a nickel film has been estimated, and its value is comparable to the reported one. Our study suggests that the nature of the surface stress originating from the magnetostrictive film can govern and modulate the resonant behavior of miniaturized mechanical systems.

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Park, Y., Lee, E. J., & Kouh, T. (2017). Field-dependent resonant behavior of thin nickel film-coated microcantilever. Micromachines, 8(4). https://doi.org/10.3390/mi8040109

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