Vibrational behavior of an electrically actuated micro-beam with thermoelastic damping

Abstract

In this paper, a resonator is modeled as a microbeam under the effect of thermoelastic damping and actuated electrically. Two models, small and large deformation models, are represented by considering linear and nonlinear Euler-Bernoulli beam theory. These models are compared against voltage, and the difference between these models is shown and discussed. In the large deformation model, the microbeam deflected due to applied DC voltage, and vibration of microbeam occurs around this static deflection. The vibration equation is linearized around static deflection and by applying harmonic vibration, equation for mode shape and frequency is obtained. The complex frequency is calculated by numerical method and then used for obtaining the Q-factor of thermoelastic damping. The stretching effect and thermoelastic damping is validated with the literature. The result shows that for the high values of voltage, the large deformation model is more accurate. The behavior of thermoelastic damping is also investigated against the geometrical and material properties. Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2014.