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High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)

  • Mohd S
  • Omar H
  • Abd I
InTech, (2012)
DOI: 10.5772/48253
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Abstract

BT - Finite Element Analysis - New Trends and Developments

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Mohd, S., Omar, H., & Abd, I. (2012). High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR). In Finite Element Analysis - New Trends and Developments. InTech. https://doi.org/10.5772/48253

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