Investigation of plasma polymer coatings deposited by means of strip hollow cathode method

Abstract

In recent years, a new plasma-enhanced chemical vapour deposition process (PE-CVD) by means of strip hollow cathode (SHC) method has been developed with specific regard to high rate deposition on thin metal sheets. Plasma polymer (PP) coatings using tetramethylsilane (TMS) have been deposited on electro-galvanized steel sheet in order to investigate the influence of process parameters on the formation of coatings and determine their corrosion-preventing behaviour. Due to the fact that an excellent corrosion resistance of the films can be achieved even as deposited at a comparatively high deposition rate, SHC is a promising method to be applied in continuous steel strip coating. © 2007 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.