Application of carbon nanotube (CNT) to photosensitive diazo /PVA resist (2) conductivity

Abstract

Electro-conductivity of a thick Diphenylamine-4-diazonium sulfate/formaldehyde condensate/polyvinyl alcohol (DSR/PVA) resist layers increased by the incorporation of multi-walled carbon nanotube (CNT) and fulleren C60 (weight ratio of CNT or C60 to DSR = 1.00: 1~3.00:1). Conductivity of DSR/PVA film with CNT was one order larger than that with C60. The larger conductivity depends on the charge leakage through the network or thread-bundle structure of multiwalled CNT. Conductivity of shorter CNT (3~20nm) was larger than that with long CNT (40~70nm). The σ values for the thin films (6μm) were ca. two times larger than those for the thick films (12 μm). Photo decomposition of DSR/PVA resist with CNT was accelerated reductively by the electrons evolved from CNT, absorbing light energy. Electron rich characteristics of CNT may play an important role in the enhancement of electric conductivity and photo decomposition rate. © 2010 CPST.