Enhanced sensitivity of nanoscale subsurface imaging by photothermal excitation in atomic force microscopy

Abstract

Photothermal excitation of the cantilever for use in subsurface imaging with atomic force microscopy was compared against traditional piezoelectric excitation. Photothermal excitation alleviates issues commonly found in traditional piezoelectrics such as spurious resonances by producing clean resonance peaks through direct cantilever excitation. A calibration specimen consisting of a 3 × 3 array of holes ranging from 200 to 30 nm etched into silicon and covered by graphite was used to compare these two drive mechanisms. Photothermal excitation exhibited a signal-to-noise ratio as high as four times when compared to piezoelectric excitation, utilizing higher eigenmodes for subsurface imaging. The cleaner and sharper resonance peaks obtained using photothermal excitation revealed all subsurface holes down to 30 nm through 135 nm of graphite. In addition, we demonstrated the ability of using photothermal excitation to detect the contact quality variation and evolution at graphite-polymer interfaces, which is critical in graphene-based nanocomposites, flexible electronics, and functional coatings.