Antenna-coupled microbolometers on a silicon-nitride membrane

Abstract

Square-spiral antenna-coupled microbolometers made of gold and chrome are fabricated on a silicon-nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared-imaging systems. The fabricated devices are measured under room pressure and under vacuum, giving D* values of 3 × 10 6 cm√Hz/W and 1.7 × 10 7 cm√Hz/W, respectively. By using vanadium-oxide, values well above 1 × 10 8 cm√Hz/W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. © 2005 Wiley Periodicals, Inc.