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Laser Irradiated Sputter-Deposited Poly-Si TFTs

  • Serikawa T
  • Shirai S
IEEJ Transactions on Fundamentals and Materials (1990) 110(10) 675-678
DOI: 10.1541/ieejfms1990.110.10_675
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Serikawa, T., & Shirai, S. (1990). Laser Irradiated Sputter-Deposited Poly-Si TFTs. IEEJ Transactions on Fundamentals and Materials, 110(10), 675–678. https://doi.org/10.1541/ieejfms1990.110.10_675

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