Three-dimensional reconstructions of electrostatic potential distributions with 1.5-nm resolution using off-axis electron holography

Abstract

Three-dimensional (3D) reconstruction experiments were carried out by observing high-resolution 3D electrostatic potential distributions of Pt nanoparticles using off-axis electron holographic tomography. These Pt nanoparticles were mounted on the surfaces of amorphous silicon pillars. In order to realize high-resolution observation, we developed a mechanically stable 3D specimen holder with small specimen drifts and vibrations. From the 3D electrostatic potential distribution data of Pt nanoparticles (2.0 nm in diameter), we obtained the resolution of 1.5 nm. © The Author 2012. Published by Oxford University Press [on behalf of Japanese Society of Microscopy]. All rights reserved.