Development of an X-ray micro-laminography system at sPring-8

Abstract

An x-ray micro-laminography system has been developed at SPring-8 and applied to measurements of planar objects that cannot be observed by x-ray computed tomography. To reconstruct a sectional image parallel to the planar surface, a filtered back-projection technique considering the inclination angle of a rotational axis was developed. Experimental conditions suitable for laminography measurements in this system were investigated. Spatial resolution in the reconstructed plane was almost determined by the detector resolution, while the spatial resolution perpendicular to the planar surface tended to be worse by the artifacts inherent of the laminographic scanning and reconstruction method. A laminated test sample was clearly observed in three dimensions. © 2011 American Institute of Physics.