Characterization of an RF excited broad beam ion source operating with inert gases

Abstract

Ion current density distributions, mass spectra, and ion energy distribution functions (IEDFs) for the use of Ar and mixtures of Ar/He and Ar/Ne in an RF broad beam ion source have been measured as a function of the extracted ion beam current and the applied RF-power. For the measurements, an array of Faraday probes and an energy-selective mass spectrometer have been used. Regardless of the gases or gas mixtures used, a broadening of the ion current density profile is measured at constant grid voltages with increasing RF-power. The IEDFs of all species are also dependent on the applied RF-power and show a bimodal shape with an increasing energy shift for a higher RF-power. The data show a significant contribution of charge exchange processes after the ions left the ion beam source. Besides ions of the process gas, additional species of ions originating from the erosion processes of the ion beam source, can be found in the mass spectrum. The measurements show that the operating conditions of the ion source have a significant influence on the beam properties and thus can also affect the results of ultraprecise ion beam-assisted processes.