3D high aspect ratio micro structures fabricated by one step UV lithography

Abstract

We present in this paper an interesting idea to fabricate 3D high aspect ratio micro structures. Pillars with different heights can be generated with one step UV lithography. Various 3D micro structures have been successfully fabricated. A Taiwan 3D terrain map is selected to demonstrate the ability of the proposed method. We will introduce the idea of this approach, fabrication details and plenty of successful experimental results in this paper. © 2007 IOP Publishing Ltd.